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Proceedings Paper

Patterning of indium-tin-oxide (ITO) films using laser-induced forward transfer (LIFT) technique
Author(s): Hironobu Sakata; Akira Yoshikado; Eisuke Yokoyama; Moriaki Wakaki
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Paper Abstract

The LIFT experiments were performed in air at room temperature for ITO films with the thickness of 180nm. A line pattern of the ITO film was obtained using a second harmonic generation SHG (532nm) beam of a Q-switched Nd:YAG laser (5.18W) with the repetition rate of 40kHz and the pulse width of 13ns. The beam was scanned using a galvano mirror optical setup system. Two kinds of sandwiched glass plate samples were used: (1) a glass plate deposited with ITO film (donor) is contact with another glass substrate (receiver) with no-gap, that is, the ITO film is in direct contact with a receiver glass, and (2) the donor is placed against the receiver glass with an 0.14mm air gap using a glass spacer. These samples were irradiated by the scanned beam with different scanning speeds. LIFT-transferred film pattern with the linear array of dot prints was obtained for the scanning speed of 200cm/s, but for the scanning speed of 10cm/s, the linear array of continuous printed tracks was produced. The edge of the printed track was clearer in (2) than (1) for the scanning speed of 10cm/s. As a result, the sample of type (2) with air-gap is preferable to obtain the line printed pattern with clear track edge, and the scanning speed should be smaller than 10 cm/s for this laser.

Paper Details

Date Published: 25 March 2011
PDF: 6 pages
Proc. SPIE 7940, Oxide-based Materials and Devices II, 794011 (25 March 2011); doi: 10.1117/12.873058
Show Author Affiliations
Hironobu Sakata, Tokai Univ. (Japan)
Akira Yoshikado, Zeta Photon Co., Ltd. (Japan)
Eisuke Yokoyama, Tokai Univ. (Japan)
Moriaki Wakaki, Tokai Univ. (Japan)


Published in SPIE Proceedings Vol. 7940:
Oxide-based Materials and Devices II
Ferechteh Hosseini Teherani; David C. Look; David J. Rogers, Editor(s)

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