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Proceedings Paper

Shaping light with MOEMS
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Paper Abstract

Shaping light with microtechnology components has been possible for many years. The Texas Instruments digital micromirror device (DMD) and all types of adaptive optics systems are very sophisticated tools, well established and widely used. Here we present, however, two very dedicated systems, where one is an extremely simple MEMS-based tunable diffuser, while the second device is complex micromirror array with new capabilities for femtosecond laser pulse shaping. Showing the two systems right next to each other demonstrates the vast options and versatility of MOEMS for shaping light in the space and time domain.

Paper Details

Date Published: 14 February 2011
PDF: 10 pages
Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300P (14 February 2011); doi: 10.1117/12.873051
Show Author Affiliations
W. Noell, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
S. Weber, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Univ. de Genève (Switzerland)
J. Masson, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
J. Extermann, Univ. de Genève (Switzerland)
L. Bonacina, Univ. de Genève (Switzerland)
A. Bich, SUSS MicroOptics SA (Switzerland)
R. Bitterli, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
H. P. Herzig, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
D. Kiselev, Univ. de Genève (Switzerland)
T. Scharf, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
R. Voelkel, SUSS MicroOptics SA (Switzerland)
K. J. Weible, SUSS MicroOptics SA (Switzerland)
J.-P. Wolf, Univ. de Genève (Switzerland)
N. F. de Rooij, Ecole Polytechnique Fédérale de Lausanne (Switzerland)


Published in SPIE Proceedings Vol. 7930:
MOEMS and Miniaturized Systems X
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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