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Proceedings Paper

A hand-held triangulation sensor for small features measurement
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Paper Abstract

This paper describes progressive generations of hand held triangulation sensors for measuring small features, from edge breaks to corrosion pits. We describe the design considerations, ergonomics, packaging and interface between the device and part, such as the sensor tip and optional fixtures. We then present a customized design to address different types of surface features and defects. Next, we present the calibration concept, and its execution. The paper closes by summarizing system performance evaluation experiments and their results. It was shown that the system is capable of measuring edges down to a radius of 250 microns at a repeatability of 50 microns.

Paper Details

Date Published: 11 November 2010
PDF: 9 pages
Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78550F (11 November 2010); doi: 10.1117/12.872460
Show Author Affiliations
Gil Abramovich, GE Global Research (United States)
Kevin Harding, GE Global Research (United States)


Published in SPIE Proceedings Vol. 7855:
Optical Metrology and Inspection for Industrial Applications
Kevin Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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