Share Email Print
cover

Proceedings Paper

Sintering of solution-based nano-particles by a UV laser pulse train
Author(s): Jie Zhang; Ming Li; Kiyoshi Morimoto
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Sintering of palladium (Pd) and silicon (Si) nano-particles (NPs) by a 266nm laser pulse train on ink-printed films was investigated. Organic Pd-ink, and organic Si-ink were used as precursors. A high repetition rate DPSS laser (up to 300 kHz, 25ns, 266nm, Coherent AVIA series), which produces a ns pulse train with 3.3 μs -33.3 μs interval of pulse-topulse, was used as the heating source. Highly electrically conductive Pd (Resistivity=~150μΩ·cm) thin film on PET substrate and semi-conductive Si (Resistivity=~23kΩ·cm) thin film on glass substrate were successfully obtained with this laser pulse train sintering process. The sintered films were characterized by AFM, SEM, TEM and Raman spectroscopy, respectively. The pulse train heating process was also numerically simulated.

Paper Details

Date Published: 22 February 2011
PDF: 11 pages
Proc. SPIE 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, 79200I (22 February 2011); doi: 10.1117/12.872007
Show Author Affiliations
Jie Zhang, Panasonic Corp. of North America (United States)
Ming Li, Panasonic Corp. of North America (United States)
Kiyoshi Morimoto, Panasonic Corp. of North America (United States)


Published in SPIE Proceedings Vol. 7920:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI
Bo Gu; Guido Hennig; Xianfan Xu; Hiroyuki Niino, Editor(s)

© SPIE. Terms of Use
Back to Top