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Proceedings Paper

Corrective, deterministic, and/or generative sub-aperture finishing
Author(s): Ken Tanimura; Kazuto Hori; Noboru Sugimoto; Toshihide Dohi
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Paper Abstract

Sub-aperture finishing is applied for the correction of the optical surface. Most important issue is how to keep stabilized sub-aperture tool contact (footprint) condition and control a removal rate and a dwell time. Magneto Rheological Finishing is one of the most advanced sub-aperture finishing process. For several years, this process was applied for a correction of spherical or flat surface after precisely measured surface data. The authors have reviewed and improved this finishing process to get more reliable finishing result. This paper shows MRF is furthermore cable to "generate" a desired optical profile from existing surface under completely controlled finishing circumstance and metrology feedback.

Paper Details

Date Published: 9 November 2010
PDF: 7 pages
Proc. SPIE 7849, Optical Design and Testing IV, 784907 (9 November 2010); doi: 10.1117/12.871940
Show Author Affiliations
Ken Tanimura, OptiWorks, Inc. (Japan)
Kazuto Hori, OptiWorks, Inc. (Japan)
Noboru Sugimoto, OptiWorks, Inc. (Japan)
Toshihide Dohi, OptiWorks, Inc. (Japan)


Published in SPIE Proceedings Vol. 7849:
Optical Design and Testing IV
Yongtian Wang; Julie Bentley; Chunlei Du; Kimio Tatsuno; Hendrik P. Urbach, Editor(s)

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