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Proceedings Paper

Using orientation Zernike polynomials to predict the imaging performance of optical systems with birefringent and partly polarizing components
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Paper Abstract

Orientation Zernike Polynomials have been shown to provide a complete and systematic description of polarized imaging using the polar decomposition of the Jones pupil. We use this concept to predict the polarization performance of high NA lithography lenses.

Paper Details

Date Published: 9 September 2010
PDF: 14 pages
Proc. SPIE 7652, International Optical Design Conference 2010, 76521T (9 September 2010); doi: 10.1117/12.871896
Show Author Affiliations
Johannes Ruoff, Carl Zeiss SMT AG (Germany)
Michael Totzeck, Carl Zeiss AG (Germany)

Published in SPIE Proceedings Vol. 7652:
International Optical Design Conference 2010
Julie Bentley; Anurag Gupta; Richard N. Youngworth, Editor(s)

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