Share Email Print
cover

Proceedings Paper

Using orientation Zernike polynomials to predict the imaging performance of optical systems with birefringent and partly polarizing components
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Orientation Zernike Polynomials have been shown to provide a complete and systematic description of polarized imaging using the polar decomposition of the Jones pupil. We use this concept to predict the polarization performance of high NA lithography lenses.

Paper Details

Date Published: 9 September 2010
PDF: 14 pages
Proc. SPIE 7652, International Optical Design Conference 2010, 76521T (9 September 2010); doi: 10.1117/12.871896
Show Author Affiliations
Johannes Ruoff, Carl Zeiss SMT AG (Germany)
Michael Totzeck, Carl Zeiss AG (Germany)


Published in SPIE Proceedings Vol. 7652:
International Optical Design Conference 2010
Julie Bentley; Anurag Gupta; Richard N. Youngworth, Editor(s)

© SPIE. Terms of Use
Back to Top