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Proceedings Paper

Time-resolved vibrational surface profile measurement of ultrasonic motor using stroboscopic oblique incidence interferometer
Author(s): Yasuhiro Mizutani; Tetsuo Iwata; Yukitoshi Otani
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Paper Abstract

We propose a measurement method of vibrational surface profile for an ultrasonic motor (USM) using a stroboscopic oblique incidence interferometer. A time-dependent behaviors of the stator, one of the main components of the USM, is of considerable practical interest for development of new devices. owever it is difficult to observe its surface profile because there are diffused and vibrational surface. An obliquely incident light would offer advantage of the diffused surface because of higher reflectance. Furthermore, for detecting interferences at the vibrational surface profile, a modulated light source is synchronized with electrical signals of the USM. We are successful to detect a vibrational surface of the stator.

Paper Details

Date Published: 11 November 2010
PDF: 7 pages
Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78550N (11 November 2010); doi: 10.1117/12.871749
Show Author Affiliations
Yasuhiro Mizutani, Univ. of Tokushima (Japan)
Tetsuo Iwata, Univ. of Tokushima (Japan)
Yukitoshi Otani, Utsunomiya Univ. (Japan)

Published in SPIE Proceedings Vol. 7855:
Optical Metrology and Inspection for Industrial Applications
Kevin Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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