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Proceedings Paper

Research on SOI-based micro-resonator devices
Author(s): Xi Xiao; Haihua Xu; Yingtao Hu; Liang Zhou; Kang Xiong; Zhiyong Li; Yuntao Li; Zhongchao Fan; Weihua Han; Yude Yu; Jinzhong Yu
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Paper Abstract

SOI (silicon-on-insulator)-based micro-resonator is the key building block of silicon photonics, which is considered as a promising solution to alleviate the bandwidth bottleneck of on-chip interconnects. Silicon-based sub-micron waveguide, microring and microdisk devices are investigated in Institute of Semiconductors, Chinese Academy of Sciences. The main progress in recent years is presented in this talk, such as high Q factor single mode microdisk filters, compact thirdorder microring filters with the through/drop port extinctions to be ~ 30/40 dB, fast microring electro-optical switches with the switch time of < 400 ps and crosstalk < -23 dB, and > 10 Gbit/s high speed microring modulators.

Paper Details

Date Published: 19 October 2010
PDF: 8 pages
Proc. SPIE 7847, Optoelectronic Devices and Integration III, 78470D (19 October 2010); doi: 10.1117/12.871719
Show Author Affiliations
Xi Xiao, Institute of Semiconductors (China)
Haihua Xu, Institute of Semiconductors (China)
Yingtao Hu, Institute of Semiconductors (China)
Liang Zhou, Institute of Semiconductors (China)
Kang Xiong, Institute of Semiconductors (China)
Zhiyong Li, Institute of Semiconductors (China)
Yuntao Li, Institute of Semiconductors (China)
Zhongchao Fan, Institute of Semiconductors (China)
Weihua Han, Institute of Semiconductors (China)
Yude Yu, Institute of Semiconductors (China)
Jinzhong Yu, Institute of Semiconductors (China)


Published in SPIE Proceedings Vol. 7847:
Optoelectronic Devices and Integration III
Xuping Zhang; Hai Ming; Alan Xiaolong Wang, Editor(s)

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