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Proceedings Paper

Measuring micro displacement based on Moiré fringe
Author(s): Shaojun Lu; Xiaolin Zhang; Rongli Guo; Lei Sun; Jun Han; Cunli Duan
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Paper Abstract

It is important to accurately obtain micro displacement in industry, especially in numerical controlled machine. But traditional methods encountered some difficulties in high-precision measurement. A new approach based on moiré fringes digital image processing technique (DIP) is proposed in this paper. A smartly designed experiment is done to grasp moiré fringes from two same gratings, so complicated equipments are not necessary which has obvious advantages. A CCD is used to acquire digital images. Then the images are done by digital image processing, including filtering and gray-scale transformation, fringes identification. A smart way to calibrate the distance represented by each pixel is given in this paper with DIP technique. The distance of a certain fringe between two images is obtained to display the micro displacement of any object. The result of this approach is compared with a higher accurate micro displacement, their similarity identify the correct of this method. We are sure that the result will be more satisfactory if higher accurate equipment is applied in inspection.

Paper Details

Date Published: 11 November 2010
PDF: 6 pages
Proc. SPIE 7850, Optoelectronic Imaging and Multimedia Technology, 78502P (11 November 2010); doi: 10.1117/12.871682
Show Author Affiliations
Shaojun Lu, Xi'an Technological Univ. (China)
Xi'an Jiao Tong Univ. (China)
Xiaolin Zhang, Xuchang Vocational and Technical College (China)
Rongli Guo, Xi'an Technological Univ. (China)
Lei Sun, Xi'an Technological Univ. (China)
Jun Han, Xi'an Technological Univ. (China)
Cunli Duan, Xi'an Technological Univ. (China)


Published in SPIE Proceedings Vol. 7850:
Optoelectronic Imaging and Multimedia Technology
Toru Yoshizawa; Ping Wei; Jesse Zheng; Tsutomu Shimura, Editor(s)

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