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Proceedings Paper

Study and considerations of nanometer and nano-radian surface profiler
Author(s): Shinan Qian; Kun Qian
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Paper Abstract

A Nanometer and Nano-radian Surface Profiler (NSP) is under development at Brookhaven National Laboratory. Nanometer and nano-radian accuracy is required for newest state-of-the-art synchrotron radiation optics and highprecision optical measurement. This test accuracy must be maintained in larger angle test range. In order to reach this accuracy we have to remove all error sources as much as possible or to reduce them to nano-radian level. We present the approaches in optimized optical system designing, scanning optical head mode selection, non-tilted reference method, quality control of optical components, and temperature stabilization. Some considerations and preliminary measurements are presented.

Paper Details

Date Published: 11 October 2010
PDF: 10 pages
Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560D (11 October 2010); doi: 10.1117/12.871258
Show Author Affiliations
Shinan Qian, Brookhaven National Lab. (United States)
Kun Qian, Brookhaven National Lab. (United States)


Published in SPIE Proceedings Vol. 7656:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Jose M. Sasian; Libin Xiang; Sandy To, Editor(s)

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