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Fabrication of polymer waveguide devices for sensor applications
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Paper Abstract

The fabrication of polymer based waveguide devices by different methods is investigated in this work including lithographic, imprinting and focused-ion-beam processing. Also, the combination of luminescent substance with waveguide is evaluated to produce integrated optical micro system including both the light source and sensor structure on a single platform.

Paper Details

Date Published: 24 November 2010
PDF: 6 pages
Proc. SPIE 7376, Laser Applications in Life Sciences, 73761A (24 November 2010); doi: 10.1117/12.871119
Show Author Affiliations
Mu Cheng, Univ. of Oulu (Finland)
Jussi Hiltunen, VTT, Technical Research Ctr. of Finland (Finland)
Meng Wang, Univ. of Oulu (Finland)
Antti Suutala, Univ. of Oulu (Finland)
Pentti Karioja, VTT, Technical Research Ctr. of Finland (Finland)
Risto Myllylä, Univ. of Oulu (Finland)

Published in SPIE Proceedings Vol. 7376:
Laser Applications in Life Sciences
Matti Kinnunen; Risto Myllylä, Editor(s)

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