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Proceedings Paper

Various tunable PCs/quasi-PCs structures fabricated by reconfigurable interference system
Author(s): H. T. Dai; X. W. Sun; D. Luo
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Paper Abstract

In this paper, we demonstrated a reconfigurable interference lithography system (RILS) based on digital mirror device (DMD), which enabled fabricating Photonic Crystals (PCs) or quasi-PCs structures with various structural lattices constant readily. The interference system is composed of a DMD chip, a concave lens and a convex lens. The DMD's amplitude modulated property enable effective multi-beams generation with various parameters such as numbers, radius and shape etc. The concave is used to extend the distance between the beamlets to achieve larger incident angle for small pitch PCs structures. Subsequently, the generated beamlets are focused to one point to present interfering by the convex lens placed after the concave lens. The interferential patterns are recorded in the polymer dispersed liquid crystal (PDLC) materials, which can be electrically tuned and switched. We also propose another reconfigurable system combined with axicon lens to achieve large effective interferential area.

Paper Details

Date Published:
PDF: 7 pages
Proc. SPIE 7852, LED and Display Technologies, 785202; doi: 10.1117/12.870587
Show Author Affiliations
H. T. Dai, Nanyang Technological Univ. (Singapore)
X. W. Sun, Nanyang Technological Univ. (Singapore)
D. Luo, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 7852:
LED and Display Technologies
Gang Yu; Yanbing Hou, Editor(s)

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