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Proceedings Paper

Flat surface measurement on fiber point diffraction phase-shifting interferometer
Author(s): Jie Li; Ling Feng Chen; Yaqing Ren
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Paper Details

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Proc. SPIE 7849, Optical Design and Testing IV, 78492Q; doi: 10.1117/12.870552
Show Author Affiliations
Jie Li, Beijing Institute of Technology (China)
Ling Feng Chen, Beijing Institute of Technology (China)
Yaqing Ren, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 7849:
Optical Design and Testing IV
Yongtian Wang; Julie Bentley; Chunlei Du; Kimio Tatsuno; Hendrik P. Urbach, Editor(s)

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