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Proceedings Paper

A detection technology of THz based on surface plasmon resonance
Author(s): Bo Su; Guoteng Duan; Cunlin Zhang
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Paper Abstract

This paper describes a new detection technology related to the bolometric micromechanical sensor for detecting THz radiation. The micromechanical sensor comprises thermo-sensitive bi-material micro-cantilever, micro-prism and optical readout system based on surface plasmon resonance for detecting the bending of the micro-cantilever. In static mode, incident radiation absorption raises the temperature of cantilever and, as a result, it bends proportionally. The cantilever bending changes the thicknesses of the gap between the lower surface of the cantilever and the metallic thin film. It will result in a shift of the SPR angle. Consequently, the surface plasmon excitation efficiency and therewith the measured at a fixed incident angle reflectance of a metallic film will be changed almost proportionally to the cantilever bending. Therefore the incident radiation power can be determined via the metallic film reflectivity change. The paper introduces the bi-material for fabricating the micro-cantilever and the optimal thickness of the gold film which is obtained through computer simulation. The material of silicon is used to fabricate the micro-prism, and the technique procedure for manufacturing the micro-prism and the micro-cantilever is described in detail. Because of its uncooled performance of the detection technology, the micromechanical sensor will have a low cost and be easy for fabrication of large bi-dimensional arrays.

Paper Details

Date Published: 4 November 2010
PDF: 9 pages
Proc. SPIE 7854, Infrared, Millimeter Wave, and Terahertz Technologies, 78541H (4 November 2010); doi: 10.1117/12.870451
Show Author Affiliations
Bo Su, Beijing Key Lab. for Terahertz Spectroscopy and Imaging, Key Lab. of Terahertz (China)
Capital Normal Univ. (China)
Guoteng Duan, Beijing Institute of Technology (China)
Cunlin Zhang, Beijing Key Lab. for Terahertz Spectroscopy and Imaging, Key Lab. of Terahertz (China)
Capital Normal Univ. (China)


Published in SPIE Proceedings Vol. 7854:
Infrared, Millimeter Wave, and Terahertz Technologies
Cunlin Zhang; Xi-Cheng Zhang; Peter H. Siegel; Li He; Sheng-Cai Shi, Editor(s)

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