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Proceedings Paper

Two-coordinate dynamic photoelectric autocollimator based on single linear CCD
Author(s): Zhenglan Bian; Min Gao; Zuoren Dong; Qing Ye; Ronghui Qu; Zujie Fang
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Paper Abstract

A competitive homemade two-coordinate autocollimator is presented, which is able to measure the angle along the horizontal and vertical axis by using a single linear CCD to detect the three image point positions of the N shape reticle on the CCD, with total measurement error no greater than 5urad in the measurement range of ±2100urad and the dynamic response frequency 2KHz.

Paper Details

Date Published: 11 November 2010
PDF: 7 pages
Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78550H (11 November 2010); doi: 10.1117/12.870026
Show Author Affiliations
Zhenglan Bian, Shanghai Institute of Optics and Fine Mechanics (China)
Min Gao, Shanghai Institute of Optics and Fine Mechanics (China)
Zuoren Dong, Shanghai Institute of Optics and Fine Mechanics (China)
Qing Ye, Shanghai Institute of Optics and Fine Mechanics (China)
Ronghui Qu, Shanghai Institute of Optics and Fine Mechanics (China)
Zujie Fang, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 7855:
Optical Metrology and Inspection for Industrial Applications
Kevin Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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