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Proceedings Paper

Computer simulation of phase-shift algorithm
Author(s): Gang Wang; Ji-xiang Yan
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Paper Abstract

When applying phase-stepping interferometry to measure wavefront with aberration, distortion is caused by various factors and the main one is phase-shifting error from phase shifter. In this paper, the calculation theory and consequence in measurement error of the phase shift algorithm are discussed. These algorithms include traditional three-phase algorithm, traditional four-phase algorithm, traditional five-phase algorithm, carre algorithm, new compensating four-phase algorithm and new compensating five-phase algorithm. According to the theory analysis and computer stimulation, these methods are compared through introduce phase-shifting error, wavefront aberration and Gauss noise, the results show the new compensating five-phase algorithm is immune to phase-shifting error, and its result is insensitive to Gauss noise, it can improve measurement accuracy effectively.

Paper Details

Date Published: 12 November 2010
PDF: 9 pages
Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78551O (12 November 2010); doi: 10.1117/12.869917
Show Author Affiliations
Gang Wang, Beijing Institute of Technology (China)
Ji-xiang Yan, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 7855:
Optical Metrology and Inspection for Industrial Applications
Kevin Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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