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Proceedings Paper

Distance measurement for curved surface based on confocal technique
Author(s): Jianbo Luo; Yiyong Liang; Wuji Ding; Guoguang Yang
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Paper Abstract

A new method based on confocal microscopy is presented to measure the distance between the focus of an objective lens and the curved surface. The focus error signal based on this method is constructed. And this signal features not only the possession of the linear relationship to the defocus, that is the distance between the focus of the objective lens and the curved surface, and direction information of defocus and a wide measuring range, but also the independence of the tilt angle of curved surface, the power fluctuation and the like.

Paper Details

Date Published: 11 November 2010
PDF: 7 pages
Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78551L (11 November 2010); doi: 10.1117/12.869825
Show Author Affiliations
Jianbo Luo, Zhejiang Univ. (China)
Zhejiang Sci-Tech Univ. (China)
Yiyong Liang, Zhejiang Univ. (China)
Wuji Ding, Hangzhou Special Equipment Inspection Institute (China)
Guoguang Yang, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 7855:
Optical Metrology and Inspection for Industrial Applications
Kevin Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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