Share Email Print
cover

Proceedings Paper

Application of photoelectric autocollimator in detecting position precision of NC motorized stage
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A photoelectric autocollimator, which consists of an optical autocollimator and an area CCD and whose standard deviation is less than 0.5" calibrated by a dual-frequency laser interferometer HP5528A, is proposed in the paper. The positional precision of a NC motorized stage is detected automatically and quickly by applying the photoelectric autocollimator calibrated and an optical polyhedron to finish the error compensation of the stage. According to GB/T 17421.2-2000, when the polyhedron and the stage both revolve with the same axis, the positional error of the stage is measured by the photoelectric autocollimator and then sent back to the controlling system of the stage manually or automatically. Experimental results show that an angle can be measured by the photoelectric autocollimator and the calculated position accuracy agrees with that which is measured by a Triangle autocollimator 500-57 at the same time.

Paper Details

Date Published: 12 November 2010
PDF: 7 pages
Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78551K (12 November 2010); doi: 10.1117/12.869820
Show Author Affiliations
Bixi Yan, Beijing Information Science and Technology Univ. (China)
Qimeng Tan, Beijing Univ. of Posts and Telecommunications (China)
Naiguang Lv, Beijing Information Science and Technology Univ. (China)


Published in SPIE Proceedings Vol. 7855:
Optical Metrology and Inspection for Industrial Applications
Kevin Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

© SPIE. Terms of Use
Back to Top