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Proceedings Paper

Porous silicon based resonant grating filters for biochemical sensing applications
Author(s): Xiaoyi Lv; Jiaqing Mo; Zhenhong Jia; Mei Xiang; Furu Zhong; Tao Jiang
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Paper Abstract

Porous silicon has attracted a great deal of attention and research for biochemical sensing applications. In this study, we report a novel porous silicon based resonant grating filters as an optical sensor platform. A narrow bandwidth in the reflectance spectrum is shown of this porous silicon grating filters and this resonance dip shift obviously after little infiltration. This research also played a potential role for the extensive applications in all-silicon biosensor.

Paper Details

Date Published: 9 November 2010
PDF: 6 pages
Proc. SPIE 7853, Advanced Sensor Systems and Applications IV, 785308 (9 November 2010); doi: 10.1117/12.869703
Show Author Affiliations
Xiaoyi Lv, Xinjiang Univ. (China)
Xi'an Jiaotong Univ. (China)
Jiaqing Mo, Xinjiang Univ. (China)
Zhenhong Jia, Xinjiang Univ. (China)
Mei Xiang, Xinjiang Univ. (China)
Furu Zhong, Xinjiang Univ. (China)
Tao Jiang, Xinjiang Univ. (China)


Published in SPIE Proceedings Vol. 7853:
Advanced Sensor Systems and Applications IV
Brian Culshaw; Yanbiao Liao; Anbo Wang; Xiaoyi Bao; Xudong Fan; Lin Zhang, Editor(s)

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