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Proceedings Paper

Noncontact fiber optic micrometer
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Paper Abstract

A sensor instrument able to measuring the thickness of different semitransparent objects with a resolution of one micron is described. This is based on a fiber optic reflectometer and a laser autofocus system and permit to measuring the thickness of thin surfaces such as semiconductor films, plastic materials and semitransparent objects. The response time for the measuring was roughly 2 sec and the thickness results were compared with a digital mechanical micrometer and both are in good agreement.

Paper Details

Date Published: 14 October 2010
PDF: 5 pages
Proc. SPIE 7839, 2nd Workshop on Specialty Optical Fibers and Their Applications (WSOF-2), 783927 (14 October 2010); doi: 10.1117/12.869392
Show Author Affiliations
F. Betancourt Ibarra, Univ. Autónoma de Nuevo León (Mexico)
Candelario Guajardo-Gonzalez, Univ. Autónoma de Nuevo León (Mexico)
Arturo Castillo-Guzman, Univ. Autónoma de Nuevo León (Mexico)
Valentin Guzman-Ramos, Univ. Autónoma de Nuevo León (Mexico)
Romeo Selvas, Univ. Autónoma de Nuevo León (Mexico)


Published in SPIE Proceedings Vol. 7839:
2nd Workshop on Specialty Optical Fibers and Their Applications (WSOF-2)
Juan Hernández-Cordero; Ismael Torres-Gómez; Alexis Méndez, Editor(s)

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