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Proceedings Paper

Microstructured optics for excimer-based systems: applications for imaging, beam shaping, and coherence management
Author(s): Robert Brunner; Hans Jürgen Dobschal; Reinhard Steiner; Matthias Burkhardt; Arnaud Deparnay; Oliver Sandfuchs; Dennis Lehr; Michael Helgert
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Paper Abstract

Imaging diffractive optical elements (DOEs), randomly distributed microlenses and sub-λ-structures allow the improvement of the performance of Excimer-based imaging and illumination systems. Here we present the concept study of a hybrid imaging system for Excimer laser high power application at a working wavelength of 308 nm. In this hybrid approach a focus has to be put onto the impact of the non-desired diffraction orders to the optical performance and also to the amount of light remaining in the system and causing lens heating. Hereby the diffraction efficiency of the DOE is of enormous importance. Especially the influence of the passive facet of blazed transmission gratings has to be considered. For illumination systems we discuss the transfer of the uneven raw profile of an Excimer-laser into a Gaussian far-field distribution by introducing a microlens array with a 2-dimensional Voronoi-pattern. The holographic record of the microlens array allows additionally to influence the coherence parameters.

Paper Details

Date Published: 9 September 2010
PDF: 8 pages
Proc. SPIE 7652, International Optical Design Conference 2010, 765227 (9 September 2010); doi: 10.1117/12.868908
Show Author Affiliations
Robert Brunner, Carl Zeiss Jena GmbH (Germany)
Univ. of Applied Sciences Jena (Germany)
Hans Jürgen Dobschal, Carl Zeiss AG (Germany)
Reinhard Steiner, Carl Zeiss Jena GmbH (Germany)
Matthias Burkhardt, Carl Zeiss Jena GmbH (Germany)
Arnaud Deparnay, Carl Zeiss Jena GmbH (Germany)
Oliver Sandfuchs, Carl Zeiss Jena GmbH (Germany)
Dennis Lehr, Carl Zeiss Jena GmbH (Germany)
Michael Helgert, Carl Zeiss Jena GmbH (Germany)

Published in SPIE Proceedings Vol. 7652:
International Optical Design Conference 2010
Julie Bentley; Anurag Gupta; Richard N. Youngworth, Editor(s)

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