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Proceedings Paper

Principle of a novel displacement sensor based on infrared He-Ne laser
Author(s): Zhengqi Zhao; Shulian Zhang; Yan Li
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Paper Abstract

Principle of using infrared dual-frequency He-Ne laser as a displacement sensor is presented. By inserting birefringent elements into laser cavity, one laser beam is splitted into two orthogonally polarized laser beams. When cavity length is changing, two beams appear one after another. Power turning curves are formed, which provide a method of displacement measurement. Compared to red He-Ne laser, infrared He-Ne laser has the feature of higher gain and corresponding stability. By counting numbers of equal-intensity points and combining subdivision techniques, displacement sensor based on infrared dual-frequency He-Ne laser is expected to afford measurement range of 100mm with resolution of 10 nm.

Paper Details

Date Published: 11 November 2010
PDF: 5 pages
Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78551H (11 November 2010); doi: 10.1117/12.868878
Show Author Affiliations
Zhengqi Zhao, Tsinghua Univ. (China)
Shulian Zhang, Tsinghua Univ. (China)
Yan Li, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 7855:
Optical Metrology and Inspection for Industrial Applications
Kevin Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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