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Proceedings Paper

Radiation damages in CMOS image sensors: testing and hardening challenges brought by deep sub-micrometer CIS processes
Author(s): Vincent Goiffon; Cédric Virmontois; Pierre Magnan; Paola Cervantes; Franck Corbière; Magali Estribeau; Philippe Pinel
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Paper Abstract

This paper presents a summary of the main results we observed after several years of study on irradiated custom imagers manufactured using 0.18 μm CMOS processes dedicated to imaging. These results are compared to irradiated commercial sensor test results provided by the Jet Propulsion Laboratory to enlighten the differences between standard and pinned photodiode behaviors. Several types of energetic particles have been used (gamma rays, X-rays, protons and neutrons) to irradiate the studied devices. Both total ionizing dose (TID) and displacement damage effects are reported. The most sensitive parameter is still the dark current but some quantum efficiency and MOSFET characteristics changes were also observed at higher dose than those of interest for space applications. In all these degradations, the trench isolations play an important role. The consequences on radiation testing for space applications and radiation-hardening-by-design techniques are also discussed.

Paper Details

Date Published: 13 October 2010
PDF: 12 pages
Proc. SPIE 7826, Sensors, Systems, and Next-Generation Satellites XIV, 78261S (13 October 2010); doi: 10.1117/12.868443
Show Author Affiliations
Vincent Goiffon, Institut Supérieur de l'Aéronautique et de l'Espace, CNRS, Univ. de Toulouse (France)
Cédric Virmontois, Institut Supérieur de l'Aéronautique et de l'Espace, CNRS, Univ. de Toulouse (France)
Pierre Magnan, Institut Supérieur de l'Aéronautique et de l'Espace, CNRS, Univ. de Toulouse (France)
Paola Cervantes, Institut Supérieur de l'Aéronautique et de l'Espace, CNRS, Univ. de Toulouse (France)
Franck Corbière, Institut Supérieur de l'Aéronautique et de l'Espace, CNRS, Univ. de Toulouse (France)
Magali Estribeau, Institut Supérieur de l'Aéronautique et de l'Espace, CNRS, Univ. de Toulouse (France)
Philippe Pinel, Institut Supérieur de l'Aéronautique et de l'Espace, CNRS, Univ. de Toulouse (France)


Published in SPIE Proceedings Vol. 7826:
Sensors, Systems, and Next-Generation Satellites XIV
Roland Meynart; Steven P. Neeck; Haruhisa Shimoda, Editor(s)

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