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Proceedings Paper

Theoretical and experimental study on the active support
Author(s): Yongqian Wu; Fan Wu; Gaofeng Wu
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Paper Abstract

The model of the multiunit control system of flexible mirror is established. The studies have shown that the surface error can be reduced with multiunit active supports effectively. The experiment of active system of 31 units, Φ300mm demonstrates the validation of the control algorithm, and reduces 90% of the error.

Paper Details

Date Published: 7 October 2010
PDF: 7 pages
Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76553J (7 October 2010); doi: 10.1117/12.868208
Show Author Affiliations
Yongqian Wu, The Institute of Optics and Electronics (China)
Fan Wu, The Institute of Optics and Electronics (China)
Gaofeng Wu, The Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 7655:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Yoshiharu Namba; David D. Walker; Shengyi Li, Editor(s)

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