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Proceedings Paper

Fabrication of composite structures based on microwrinkles
Author(s): Xiaoli Zhao; Weiwei An; Haichao Yu; Liqin Wang
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Paper Abstract

The composite structures were fabricated by wrinkle formation and optical lithography. Complex and ordered wrinkle patterns are spontaneously created on metal thin films thermally deposited onto elastomeric polymers owing to mismatch of thermal expansion. In the experiments, a thin film of Au with 20-50 nm thick was deposited by ion sputtering on the surface of polydimethylsiloxane (PDMS) substrates. To modulate wrinkle patterns regularly and uniformly, optical lithography was used to fabricate given structures in Silicon wafers, and these structures were transferred onto PDMS substrates by replica molding. In the process of wrinkle formation, the configuration on the PDMS substrates could effect or regulate wrinkle formation, and so the composite structures effectively integrate the lithographic and wrinkle patterns. These unique structures have potential application in optical devices, sensors and actuators.

Paper Details

Date Published: 13 October 2010
PDF: 5 pages
Proc. SPIE 7654, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 76541C (13 October 2010); doi: 10.1117/12.867937
Show Author Affiliations
Xiaoli Zhao, Harbin Institute of Technology (China)
Weiwei An, Northeast Forestry Univ. (China)
Haichao Yu, China Electronics Technology Group Corp. (China)
Liqin Wang, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 7654:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes
Wenhan Jiang; Myung K. Cho; Fan Wu, Editor(s)

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