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Proceedings Paper

Design and fabrication of diffractive microlens and analysis of optical characteristics
Author(s): Meng Wang; Bin Li; Ming-yue Wei; Xin-yu Zhang; Chang-Sheng Xie; Tian-xu Zhang
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Paper Abstract

The method for designing diffractive microlens with micro-nano-scale structural features, through iterative angular spectrum algorithm, and fabricating diffractive microlens by single-step photolithography and a wet etching process, based on standard micro-nano-technology, was presented. Surface morphology testing shows that the diffractive microlens fabricated is composed of multi-step continuous relief structures with the feature height in the micrometer range, the distribution of the surface micro-nano-structures is circular symmetry, and the transition between the circular rings is smooth. A large number of fine structures with micro-nano-scale features can be clearly observed in the scanning electron microscope on the surface of the diffractive microlens. Surface roughness data tested shows that the surface roughness of fabricated diffractive microlens is in the nanometer range, which has reached the level of optical mirror. The optical aperture is in the micrometer range. The characteristics of the micro-structures on the surface and the optical aperture can be set and arranged flexibly by the iterative angular spectrum algorithm, according to the characteristics and parameters of the incident and outgoing beam. The results of optical characteristics measurement show that the diffractive microlens can focus incident red laser into a very small bright focal spot, and the phenomenon of focusing and defocusing is obvious. The analysis of beam quality shows that the intensity distribution and size of the focal-spot is in accord with pre-calculated results. The fabricated diffractive microlens indicates a very high diffraction efficiency. The experimental results demonstrate that the performances of the diffractive microlens can be further improved by modifying the design algorithm and optimizing the manufacture craft.

Paper Details

Date Published: 22 October 2010
PDF: 5 pages
Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 765717 (22 October 2010); doi: 10.1117/12.867852
Show Author Affiliations
Meng Wang, Institute for Pattern Recognition and Artificial Intelligence (China)
Wuhan National Lab. for Optoelectronics (China)
Huazhong Univ. of Science and Technology (China)
Bin Li, Institute for Pattern Recognition and Artificial Intelligence (China)
Wuhan National Lab. for Optoelectronics (China)
Huazhong Univ. of Science and Technology (China)
Ming-yue Wei, Institute for Pattern Recognition and Artificial Intelligence (China)
Wuhan National Lab. for Optoelectronics (China)
Huazhong Univ. of Science and Technology (China)
Xin-yu Zhang, Institute for Pattern Recognition and Artificial Intelligence (China)
Wuhan National Lab. for Optoelectronics (China)
Huazhong Univ. of Science and Technology (China)
Chang-Sheng Xie, Wuhan National Lab. for Optoelectronics (China)
Tian-xu Zhang, Institute for Pattern Recognition and Artificial Intelligence (China)
Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7657:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Tianchun Ye; Sen Han; Masaomi Kameyama; Song Hu, Editor(s)

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