Share Email Print
cover

Proceedings Paper

Performance comparison of optical path difference calculation algorithms for wavelength scanning interferometry
Author(s): Kai Wei Wang; CaoYan Long
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Frequency-scanning interferometry is a very useful absolute distance and areal surface profile measurement technique as it generates absolute optical path difference without any mechanical scanning. It is thus critical to select an appropriate algorithm to precisely and rapidly acquire the phase with respect of the wavenumber and optical path difference of the interference fringe. In this paper we analyze and demonstrate in detail the processing speed and accuracy of current optical path difference calculation algorithms. It is pointed out that the algorithm based on Fourier transform - inverse Fourier transform has the highest performance in terms of calculation time and overall noise insensitivity, while the phase shifting algorithm has the highest calculation accuracy when noise level is low.

Paper Details

Date Published: 11 October 2010
PDF: 8 pages
Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560V (11 October 2010); doi: 10.1117/12.867761
Show Author Affiliations
Kai Wei Wang, Zhejiang Univ. (China)
CaoYan Long, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 7656:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Jose M. Sasian; Libin Xiang; Sandy To, Editor(s)

© SPIE. Terms of Use
Back to Top