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Proceedings Paper

Temperature gradients effect on surface test with high precise interferometer
Author(s): Er-long Miao; Yong-qiang Gu
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Paper Abstract

In high precise surface testing, temperature stability and uniformity are of paramount importance to the high accuracy of test results. Micro-temperature variation and temperature gradients not only cause the change of the air refractive index and lead to the optical path variation in interferometer cavity, but also result in deformation of the tested surface itself, which always brings about errors to the test results. Temperature effects on the interferometer cavity and the tested surface are analyzed from the axial and radial directions in this letter. Temperature model of the interferometer cavity and the tested lens are established and quantitative calculations and diagram of test results versus temperature and lens dimension are provided. It shows that temperature gradients effect increase with the length of the interferometer and the dimension of the tested lens. The interferometer cavity is mainly affected by radial temperature gradients while the tested lens is mainly affected by the axial temperature gradients.

Paper Details

Date Published: 12 October 2010
PDF: 6 pages
Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 765642 (12 October 2010); doi: 10.1117/12.867750
Show Author Affiliations
Er-long Miao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Yong-qiang Gu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of CAS (China)


Published in SPIE Proceedings Vol. 7656:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Jose M. Sasian; Libin Xiang; Sandy To, Editor(s)

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