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Proceedings Paper

Research on chemical cleaning technology for super-smooth surface of fused silica substrate
Author(s): Lingyan Jiao; Yuzhu Jin; Yiqin Ji; Yi Tong; Fang Wang; Tao Liu; Lishuan Wang
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Paper Abstract

A chemical technology for cleaning super-smooth surface, based on wet method, is put forward in order to solve the problems including that the dirt existing on the surface of optical components is difficult to remove, and the system used to estimate the surface quality is hard to establish. Firstly, in this paper, all kinds of dirt existing on optical surface and their adsorption mechanism are discussed. Secondly, a cleaning route has been designed. Thirdly, all the reagents in use are prepared and their decontamination capabilities are described. Finally, the cleaned optical components are tested. The result shows that the surface cleanliness is high, the defect density is no more than 0.7/mm2 within a certain area, and the scattering loss is no more than 20ppm.

Paper Details

Date Published: 7 October 2010
PDF: 6 pages
Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76552J (7 October 2010); doi: 10.1117/12.867514
Show Author Affiliations
Lingyan Jiao, Tianjin Jinhang Institute of Technical Physics (China)
Yuzhu Jin, Tianjin Jinhang Institute of Technical Physics (China)
Yiqin Ji, Tianjin Jinhang Institute of Technical Physics (China)
Yi Tong, Tianjin Jinhang Institute of Technical Physics (China)
Fang Wang, Tianjin Jinhang Institute of Technical Physics (China)
Tao Liu, Tianjin Jinhang Institute of Technical Physics (China)
Lishuan Wang, Tianjin Jinhang Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 7655:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Yoshiharu Namba; David D. Walker; Shengyi Li, Editor(s)

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