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Proceedings Paper

Study on annular polishing for a rectangle optical flat with high aspect ratio
Author(s): Zhicheng Ma; Junfeng Li; Shumei Song
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Paper Abstract

The annular polishing is used to manufacture a rectangle optical flat with high aspect ratio in this paper. To control the polishing conveniently, a theoretical model based on the Preston hypothesis is given. According to the model, the problems related to control the power and the edge effect occurred during the process are analyzed and practically solved. Finally, the surface PV of 60 nm was achieved.

Paper Details

Date Published: 6 October 2010
PDF: 7 pages
Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76552D (6 October 2010); doi: 10.1117/12.867489
Show Author Affiliations
Zhicheng Ma, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of Chinese Academy of Sciences (China)
Junfeng Li, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of Chinese Academy of Sciences (China)
Shumei Song, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 7655:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Yoshiharu Namba; David D. Walker; Shengyi Li, Editor(s)

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