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Proceedings Paper

Femtosecond laser damage and ablation of dielectrics: determinism, selectivity, and nanometric resolution
Author(s): N. Sanner; O. Utéza; B. Chimier; A. Brocas; N. Varkentina; M. Sentis; P. Lassonde; F. Légaré; J. C. Kieffer
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Paper Abstract

We present a coupled study of laser-induced damage and ablation of fused silica in the femtosecond regime. Both thresholds are essentially different and investigations under a wide excursion of pulse duration (< 10 fs to 300 fs) and applied fluence (Fth < F < 10 Fth) provide quantitative knowledge on i) the strength of the so-called "deterministic" character of femtosecond laser damaging, linked to ionization mechanisms ; ii) the physical characteristics of surface ablation craters demonstrating that high selectivity and nanometric resolution is achievable.

Paper Details

Date Published: 29 November 2010
PDF: 10 pages
Proc. SPIE 7842, Laser-Induced Damage in Optical Materials: 2010, 78420W (29 November 2010); doi: 10.1117/12.866738
Show Author Affiliations
N. Sanner, Lab. Lasers, Plasmas et Procédés Photoniques, CNRS, Univ. de la Méditerranée (France)
O. Utéza, Lab. Lasers, Plasmas et Procédés Photoniques, CNRS, Univ. de la Méditerranée (France)
B. Chimier, Lab. Lasers, Plasmas et Procédés Photoniques, CNRS, Univ. de la Méditerranée (France)
A. Brocas, Lab. Lasers, Plasmas et Procédés Photoniques, CNRS, Univ. de la Méditerranée (France)
N. Varkentina, Lab. Lasers, Plasmas et Procédés Photoniques, CNRS, Univ. de la Méditerranée (France)
M. Sentis, Lab. Lasers, Plasmas et Procédés Photoniques, CNRS, Univ. de la Méditerranée (France)
P. Lassonde, Institut National de la Recherche Scientifique (Canada)
F. Légaré, Institut National de la Recherche Scientifique (Canada)
J. C. Kieffer, Institut National de la Recherche Scientifique (Canada)


Published in SPIE Proceedings Vol. 7842:
Laser-Induced Damage in Optical Materials: 2010
Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; M. J. Soileau, Editor(s)

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