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Proceedings Paper

Waveguide ring coupling design of MOG
Author(s): Xiang Ji; Zi-li Li; Yuan-you Chen; Xiao-hu Qin; Xin Lv
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Paper Abstract

The key technology of micro optic gyroscopes (MOGs) is to fabricate low-loss waveguide and use coupling technology to form reciprocal structure. The main topic in this paper is to study the coupling structure of MOG's spiral-ring waveguide. Using for the reference of fiber's low-loss character, the fiber-preform project is chosen as optimization means. According to the singlemode conditions, the width and thickness of rectangle waveguide can be calculated. The bend loss waveguide can decrease by means of introducing an offset at the junction of two waveguides and etching groove at the outside of bend waveguide. In this article intersection waveguide is designed to reduce the difficulty of coupling processing. Light in-and-out port coupled at opposite side is choosen for machining easiness in experiment.What's more, the edge-coupling technology being put forward to keep light transmit along the same rotary direction. An efficient means is introduced, which uses angle 45°to reflect the light to couple two waveguide at inside-end or outside-end, and outside-end coupling is chosen for processing convenience in the design. In experiment, the waveguide be fabricated by thick photoresist AZ4620, etched by RIE, When the angle of wafer and ion is set 85°, the angle of one sidewall can be etched almost 45°. It's benefit to design the coupling structure of MOG's spiral-ring waveguide.

Paper Details

Date Published: 22 October 2010
PDF: 7 pages
Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 76571P (22 October 2010); doi: 10.1117/12.866430
Show Author Affiliations
Xiang Ji, National Univ. of Defense Technology (China)
Unit 63891, People's Liberation Army (China)
Zi-li Li, Unit 63891, People's Liberation Army (China)
Yuan-you Chen, Unit 63891, People's Liberation Army (China)
Xiao-hu Qin, Unit 63891, People's Liberation Army (China)
Xin Lv, Unit 63891, People's Liberation Army (China)


Published in SPIE Proceedings Vol. 7657:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Tianchun Ye; Sen Han; Masaomi Kameyama; Song Hu, Editor(s)

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