Share Email Print
cover

Proceedings Paper

Study on optical properties of two-color microbolometers
Author(s): Henan Zhao; Tao Wang; He Yu; Chao Chen; Yadong Jiang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In this article, the practical structure of two-color microbolometers for uncooled infrared detection was considered, a mathematical model to calculate infrared absorptance was described. The optical characteristic of multilayer structure consisting of Nitride (SiNx) infrared absorber film/ Vanadium (VOx) heat sensitive film/ SiNx support film/ the first optical resonant cavity/ a tunable reflecting Al micromirror/ the second optical resonant cavity /a bottom electrode made up of Al was investigated. According to optical admittance matrix theory, relation between infrared absorber film thickness, the first optical resonant cavity of two-color microbolometer and infrared absorptivity was simulated by MATLAB software.

Paper Details

Date Published: 22 October 2010
PDF: 6 pages
Proc. SPIE 7658, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology, 76585A (22 October 2010); doi: 10.1117/12.866319
Show Author Affiliations
Henan Zhao, Univ. of Electronic Science and Technology of China (China)
Tao Wang, Univ. of Electronic Science and Technology of China (China)
He Yu, Univ. of Electronic Science and Technology of China (China)
Chao Chen, Univ. of Electronic Science and Technology of China (China)
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 7658:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology
Yadong Jiang; Bernard Kippelen; Junsheng Yu, Editor(s)

© SPIE. Terms of Use
Back to Top