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Proceedings Paper

A new system for measuring the diffraction efficiency of large aperture gratings
Author(s): Xiaowei Zhou; Xiao Wang; Zhengkun Liu; Xiangdong Xu; Shaojun Fu
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Paper Abstract

A simple and new system for measuring the diffraction efficiency of large aperture gratings at littrow angle is established in this paper. The reference grating Po, double beams and timer with shutter have been draw into the system for eliminating the impact of polarization and stray light, fluctuation of incident light, and the fatigue of photodetector. A program is designed to scan, measure and calculate the diffraction efficiency of the gratings automatically. The diffraction efficiency accuracy measured for the gratings is increased by ~1% with this system. To achieve more measured accuracy, additional beam of reflection light should be imported.

Paper Details

Date Published: 22 October 2010
PDF: 7 pages
Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 76571E (22 October 2010); doi: 10.1117/12.866282
Show Author Affiliations
Xiaowei Zhou, Univ. of Science and Technology of China (China)
Xiao Wang, Univ. of Science and Technology of China (China)
Zhengkun Liu, Univ. of Science and Technology of China (China)
Xiangdong Xu, Univ. of Science and Technology of China (China)
Shaojun Fu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 7657:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Tianchun Ye; Sen Han; Masaomi Kameyama; Song Hu, Editor(s)

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