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Proceedings Paper

Poly (ethylene terephthalate) (PET) micro/nanostructures fabricated by nanoimprint and its applications
Author(s): Xudi Wang; Jian Jin; Qisheng Tang; Wenrui Tian; Xiaojun Li; Shaojun Fu; Yanlin Liao
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Paper Abstract

In this paper, we present a novel method for the fabrication of high density pattern in PET foils employing nanoimprint lithorgraphy. The temperature and pressure dependence on the imprinted pattern were investigated. Well resolved PET nanopatterns (sub-100nm resolution) were transferred successfully. It is observed that the grating with different trench depths will demonstrates corresponding changes of diffraction intensity distribution. The grating imprinted in PET foils could broader applications in the manufacture of nanophotonic structures owing to its excellent flexibility and transparency. Based on the optimized imprint process, a novel method for the fabrication of phase gratings and nanochannels is presented. This developed process can find broader applications in the manufacture of nanofluidic channels and other nanophotonic structures.

Paper Details

Date Published: 22 October 2010
PDF: 6 pages
Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 765710 (22 October 2010); doi: 10.1117/12.866228
Show Author Affiliations
Xudi Wang, Hefei Univ. of Technology (China)
Jian Jin, Hefei Univ. of Technology (China)
Qisheng Tang, Hefei Univ. of Technology (China)
Wenrui Tian, Hefei Univ. of Technology (China)
Xiaojun Li, Univ. of Science and Technology of China (China)
Shaojun Fu, Univ. of Science and Technology of China (China)
Yanlin Liao, Anhui Univ. (China)


Published in SPIE Proceedings Vol. 7657:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Tianchun Ye; Sen Han; Masaomi Kameyama; Song Hu, Editor(s)

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