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Proceedings Paper

Design and analysis of deep ultraviolet microlithography illumination system
Author(s): Xing Han; Lin Li; Yifan Huang; Baolin Du; Bin Ma; Zihui Che
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Paper Abstract

To achieve high uniformity in large area on the mask of deep ultraviolet micro-lithography lens, a deep study of DUV micro-lithography illumination system is expanded in both theoretical and experimental aspects in this paper. Characters of different illumination structures and mode are introduced. Then an applicable illumination mode according to the requirements is selected. At the same time, two kinds of removing the uneven illumination ways--fly-eyes and optical tunnel are studied. After that, according to the large numerical aperture requirement, a refractive illumination system is designed with software ZEMAX. In this system, methods are used to reduce the number of the aspherical mirrors. The system is optimized to meet the requirement of large illumination area on the mask. Then by using the software of TracePro, the optimized system modeling and calculate illuminance on image plane are created and the uniformity of the image plane is analysised. The result shows that the uniformity of the image plane and the size of light spot basically satisfied the requirements, and having great feasibility in DUV micro-lithography illumination system.

Paper Details

Date Published: 22 October 2010
PDF: 6 pages
Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 765715 (22 October 2010); doi: 10.1117/12.866224
Show Author Affiliations
Xing Han, Beijing Institute of Technology (China)
Lin Li, Beijing Institute of Technology (China)
Yifan Huang, Beijing Institute of Technology (China)
Baolin Du, Beijing Institute of Technology (China)
Bin Ma, Beijing Institute of Technology (China)
Zihui Che, Baoding Univ. (China)


Published in SPIE Proceedings Vol. 7657:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Tianchun Ye; Sen Han; Masaomi Kameyama; Song Hu, Editor(s)

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