Share Email Print
cover

Proceedings Paper

Analysis of closed fringe patterns for aspheric surface measurement
Author(s): Liang Nie; Baoyuan Liu; Jun Han; Xun Yu
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The closed fringe patterns analysis is difficult to handle, especially in interferometer for aspheric surface measurement. Two-dimensional fast Fourier transform (FFT) algorithm is proposed to extract interferogram phase in this paper. The principle and process of FFT method is described and the computer simulation proves its validity. Some key techniques are researched, such as the filter design and the elimination of prejudicial error. In order to eliminate the effect of the abrupt change in the wrapped phase map, the rectangular low-pass filters with different directions and image stitching technology are applied. To reduce spectral leakage, filter design and determination method of phase mutation position are discussed. The unwrapped phase distribution is got by the unweighted least-squares phase unwrapping algorithm and the error of spherical figure is derived from the fitting method of Zernike polynomials. The simulation results show that the method is up to high precision. The methods are used to treat the aspheric surface measurement in experiment. The results of processing the aspheric surface interferograms in a zone-plate interferometer indicate that the methods have achieved worthy measurement precision and have great development potential.

Paper Details

Date Published: 16 October 2010
PDF: 5 pages
Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76565K (16 October 2010); doi: 10.1117/12.866158
Show Author Affiliations
Liang Nie, Xi'an Technological Univ. (China)
Baoyuan Liu, Xi'an Technological Univ. (China)
Jun Han, Xi'an Technological Univ. (China)
Xun Yu, Xi'an Technological Univ. (China)


Published in SPIE Proceedings Vol. 7656:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Jose M. Sasian; Libin Xiang; Sandy To, Editor(s)

© SPIE. Terms of Use
Back to Top