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Proceedings Paper

Analysis of silicon-based optical racetrack resonator for acceleration sensing
Author(s): Wenqin Mo; Huaming Wu; Dingshan Gao; Zhiping Zhou
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Paper Abstract

Silicon based racetrack resonator are demonstrated as highly sensitive acceleration sensor. The sensor consists of a straight waveguide coupled with a racetrack resonator, and a crossbeam seismic mass serving as the vibration unit. The resonant wavelength, which depends on the optical phase change per round trip, is sensitive to external accelerations due to the waveguide increment and stress-optic effect. With a 30-dB signal-to-noise ratio measurement system, the detection limit and dynamic range are theoretically obtained as high as 4.8×10-4 g under the frequency of acceleration below 200 Hz. The new silicon-based accelerometer will have great potential in seismic prospecting due to its high sensitivity, light weight and immunity to electromagnetic interference.

Paper Details

Date Published: 22 October 2010
PDF: 6 pages
Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 765704 (22 October 2010); doi: 10.1117/12.866030
Show Author Affiliations
Wenqin Mo, Huazhong Univ. of Science and Technology (China)
China Univ. of Geosciences (China)
Huaming Wu, Huazhong Univ. of Science and Technology (China)
Dingshan Gao, Huazhong Univ. of Science and Technology (China)
Zhiping Zhou, Peking Univ. (China)
Georgia Institute of Technology (United States)


Published in SPIE Proceedings Vol. 7657:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Tianchun Ye; Sen Han; Masaomi Kameyama; Song Hu, Editor(s)

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