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Proceedings Paper

Determination the optical constants of hafnium oxide film by Spectroscopic ellipsometry with various dispersion models
Author(s): Weidong Gao; Yinhua Zhang; Hongxiang Liu
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Paper Abstract

Optical constants of vacuum-deposited hafnium oxide film (HfO2) from infrared to ultraviolet spectral region (215nm-1700nm) have been determined by variable angle Spectroscopic ellipsometry with Cauchy dispersion model, Sellmeier dispersion model, Cauchy-Urbach dispersion model and Tauc-Lorentz dispersion model, respectively. The optical constants of the HfO2 film which were extracted with the four dispersion models have been compared. The surface roughness layer between HfO2 film and air and the interface layer between the film and the substrate have also been modeled with Bruggeman effective medium approximation (BEMA).

Paper Details

Date Published: 13 October 2010
PDF: 8 pages
Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76566T (13 October 2010); doi: 10.1117/12.865979
Show Author Affiliations
Weidong Gao, Institute of Optics and Fine Mechanics (China)
Yinhua Zhang, Institute of Optics and Fine Mechanics (China)
Hongxiang Liu, Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 7656:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Jose M. Sasian; Libin Xiang; Sandy To, Editor(s)

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