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Proceedings Paper

Research of active supporting technology based on 400mm thin mirror
Author(s): Hong-zhuang Li; Xin-yue Liu; Jian-li Wang
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Paper Abstract

Using a spherical mirror of 400mm diameter and 12mm thickness, active supporting technology of thin mirror is researched. The axial support of the mirror is composed of 12 active supports and 3 fixed supports. The force actuator, which is composed of displacement actuator and force sensor, is installed in the active support. The mirror surface is tested by Zygo interferometer. For calibration, each actuator exerts unit force alone, and the surface variation is tested and taken as the response function of the actuator. The response functions of all actuators compose the stiffness matrix. Then the stiffness matrix is used by damped least square method to determine the correction force of each active support. In order to analyze the correction capability of the active supports, 14 Zernike modes of the mirror surface are generated and tested respectively, and 7 modes are selected for correction. Initially, the RMS error of mirror surface is 1.16λ I(λ =0.6328nm)when all actuators exert the same force. After 5 iterations, the RMS error of mirror surface is reduced to 0.13λ, close to the original surface quality.

Paper Details

Date Published: 13 October 2010
PDF: 8 pages
Proc. SPIE 7654, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 765404 (13 October 2010); doi: 10.1117/12.865919
Show Author Affiliations
Hong-zhuang Li, Changchun Institute of Optics (China)
Xin-yue Liu, Changchun Institute of Optics (China)
Jian-li Wang, Changchun Institute of Optics (China)


Published in SPIE Proceedings Vol. 7654:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes
Wenhan Jiang; Myung K. Cho; Fan Wu, Editor(s)

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