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Proceedings Paper

Surface roughness measurement by digital holography
Author(s): Yan Li; Dayong Wang; Jie Zhao; Guangjun Wang; Yunxin Wang
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Paper Abstract

Surface roughness is crucial guideline to the surface quantity of work piece. This paper demonstrates a simple approach for measurement of surface roughness by using digital holography imaging method based on reflection off-axis lensless Fourier transform (LFT) holography. The surface profiles of the standard roughness sample plates which have the different arithmetic average height values are used as the measurement sample. Comparing the arithmetical average height values of the roughness sample plates obtained from the experiment with the given parameters, the results are in good agreement. It has shown that the method is reasonable and efficient.

Paper Details

Date Published: 11 October 2010
PDF: 8 pages
Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560X (11 October 2010); doi: 10.1117/12.865743
Show Author Affiliations
Yan Li, Beijing Univ. of Technology (China)
Dayong Wang, Beijing Univ. of Technology (China)
Jie Zhao, Beijing Univ. of Technology (China)
Guangjun Wang, Beijing Univ. of Technology (China)
Henan Institute of Metrology (China)
Yunxin Wang, Beijing Univ. of Technology (China)


Published in SPIE Proceedings Vol. 7656:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Jose M. Sasian; Libin Xiang; Sandy To, Editor(s)

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