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Proceedings Paper

Analysis and test of a piezoelectric deformable mirror
Author(s): Dan Wang; Chaoming Li; Jianhong Wu
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Paper Abstract

Adaptive optics is concerned with correcting a distorted wavefront by introducing a counter aberration into an element of the optical system, it use widely in astronomy and there are also applications in microscopy, the writing of 3D optical bit memory and photo-fabrication now. As an active correction element in adaptive optics, a deformable mirror can be used to modify the phase of the beam actively. In this paper, the active wave front correction method of adaptive optics system is studied, types and characteristics of the actuators of deformable mirror are analyzed, and mainly introduces piezoelectric deformable mirror. According to the conclusion of theoretical analysis, if the material is selected, diameter and thickness of the deformable mirror are given, the displacement of the deformable mirror is directly proportional to the initial loads. A deformable mirror has been manufactured with silica. The silica plate is 100mm in diameter and 10mm in thick. 37-electrode piezoelectric actuators are selected to correct low-order aberrations. Based on the ANSYS software, the finite element analysis model of deformable mirror is calculated. The influence of the major structural parameters is discussed. The calculated result and the conclusion of theoretical analysis are compared. Results show that, the endless improvement of finite element model is necessary and feasible. The value of optimization design and the conclusion of theoretical analysis are consistent with each other. The research we do lay the foundation for the further study with more actuators and correcting high-frequency aberration.

Paper Details

Date Published: 11 October 2010
PDF: 6 pages
Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76563K (11 October 2010); doi: 10.1117/12.865687
Show Author Affiliations
Dan Wang, Suzhou Univ. (China)
Chaoming Li, Suzhou Univ. (China)
Jianhong Wu, Suzhou Univ. (China)


Published in SPIE Proceedings Vol. 7656:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Jose M. Sasian; Libin Xiang; Sandy To, Editor(s)

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