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Proceedings Paper

Measurement and analysis of surface profiles by inverse scattering method
Author(s): Shu-yan Chen; Xin-jun Xu
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Paper Abstract

Evaluation and measurement of surface profiles are very important especially to short wavelength optical research. A linear system treatment of short-wavelength surface scattering theory is introduced, and based on this, a new inverse scattering mathematical model of soft X-ray grazing incidence optics is established. By using these scattered light distributions of super-smooth surfaces measured by a soft X-ray reflectometer, the surface profiles of super-smooth surfaces are computed by means of inverse scattering mathematical model of soft X-ray grazing incidence optics. The calculating results are in accordance with those measured by WYKO. It can be concluded that the soft X-ray grazing incidence optical scattering method can calculate micro-roughness and surface auto correlation function of smooth surface accurately, and can give optical surface profiles intuitively.

Paper Details

Date Published: 12 October 2010
PDF: 7 pages
Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76565J (12 October 2010); doi: 10.1117/12.865564
Show Author Affiliations
Shu-yan Chen, Harbin Engineering Univ. (China)
Xin-jun Xu, Harbin Engineering Univ. (China)


Published in SPIE Proceedings Vol. 7656:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Jose M. Sasian; Libin Xiang; Sandy To, Editor(s)

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