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Proceedings Paper

Study on the dependence of properties of TiOx heat sensitive films on deposit oxygen flow rate
Author(s): Jing Jiang; Zhiming Wu; Yonglong Qiu; He Yu; Yadong Jiang
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Paper Abstract

In this article, titanium oxide thin films (TiOx) are prepared with the reactive DC sputtering in an oxygen and argon atmosphere. Properties of titanium oxide films could be largely varied by controlling the deposition condition. Here we study on the dependence of sheet resistance, thickness, optical transmittance and film composition of titanium oxide films on different deposit oxygen flow rates.

Paper Details

Date Published: 22 October 2010
PDF: 5 pages
Proc. SPIE 7658, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology, 76583J (22 October 2010); doi: 10.1117/12.865557
Show Author Affiliations
Jing Jiang, Univ. of Electronic Science and Technology of China (China)
Zhiming Wu, Univ. of Electronic Science and Technology of China (China)
Yonglong Qiu, Univ. of Electronic Science and Technology of China (China)
He Yu, Univ. of Electronic Science and Technology of China (China)
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 7658:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology
Yadong Jiang; Bernard Kippelen; Junsheng Yu, Editor(s)

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