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Proceedings Paper

Research of electromagnetic drive micromechanical gyroscope based on tunneling effect of multi-barrier nano thin films
Author(s): Kang Du; Ruirong Wang; Mengwei Li; Jun Liu; Yunbo Shi
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Paper Abstract

Multi-barrier nano-thin films device is a new device based on the quantum tunneling effect. This kind of device has piezoresistive effect and the piezoresistive sensitivity is about one order than that of silicon piezoresistive device. Thin film device fabricated by using molecular beam epitaxy (MBE) has the advantages of small temperature drift compared with the doped devices. Comparing with the electrostatic comb-drive mode, the electromagnetic driving approach is not only with simple structure and easy to fabrication, but also can achieve large displacement-driven. These two methods applied to the study of gyroscope can improve the sensitivity in essence. In this paper, a novel gyroscope structure with folding-type orthogonal beams is designed which is not only meet the drive approach, but also meet the detection conditions. The nano thin films device and gyroscope structure are fabricated by the GaAs surface micromachining and GaAs bulk micromachining processes respectively. The preliminary measurement results prove that the gyroscope design is feasible.

Paper Details

Date Published: 13 October 2010
PDF: 6 pages
Proc. SPIE 7659, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Smart Structures and Materials in Manufacturing and Testing, 765916 (13 October 2010); doi: 10.1117/12.865461
Show Author Affiliations
Kang Du, North Univ. of China (China)
Ruirong Wang, North Univ. of China (China)
Mengwei Li, North Univ. of China (China)
Jun Liu, North Univ. of China (China)
Yunbo Shi, North Univ. of China (China)


Published in SPIE Proceedings Vol. 7659:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Smart Structures and Materials in Manufacturing and Testing
Xiangang Luo; Georg von Freymann, Editor(s)

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