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Proceedings Paper

Integration of a fiber interferometer with a MEMS probe station
Author(s): Tristan J. Tayag; Thiri Htun; Edward S. Kolesar
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Paper Abstract

We present the integration of an optical fiber interferometer with a MEMS probe station for measuring the out-of-plane displacement of MEMS structures. The interferometric system presented uses a phase generated carrier demodulation scheme. Digital signal processing techniques provide a theoretical measurement dynamic range greater than 108. Experimental results characterizing a novel vertical-lift electro-thermal actuator are presented. These results are in good agreement with modeling data based on finite element analysis.

Paper Details

Date Published: 2 August 2010
PDF: 6 pages
Proc. SPIE 7791, Interferometry XV: Applications, 77910R (2 August 2010); doi: 10.1117/12.864252
Show Author Affiliations
Tristan J. Tayag, Texas Christian Univ. (United States)
Thiri Htun, TriQuint Semiconductor, Inc. (United States)
Edward S. Kolesar, Texas Christian Univ. (United States)

Published in SPIE Proceedings Vol. 7791:
Interferometry XV: Applications
Cosme Furlong; Christophe Gorecki; Erik L. Novak, Editor(s)

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