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Proceedings Paper

Thin film metrology by FFT using SE and SR signal
Author(s): Jangik Park; Yusin Yang
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Date Published:
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Proc. SPIE 7823, Photomask Technology 2010, 78233G; doi: 10.1117/12.864164
Show Author Affiliations
Jangik Park, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Yusin Yang, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)


Published in SPIE Proceedings Vol. 7823:
Photomask Technology 2010
M. Warren Montgomery; Wilhelm Maurer, Editor(s)

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