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Proceedings Paper

Self-mixing interferometry based on quadrature demodulation technique for displacement measurement
Author(s): Dongmei Guo; Hui Hao; Daofu Han
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Paper Abstract

A new, to the best of our knowledge, method for the measurement of the micro-displacement of a remote target based on the laser diode self-mixing interferometry(LDSMI) is presented. Quadrature demodulation technique is introduced to improve the measurement accuracy. Phase modulation of the laser beam is obtained by an electro-optic modulator (EOM) in the external cavity. Detection of the target's displacement can be easily achieved by sampling the interference signal at those times which satisfied certain conditions. The major advantage of the technique is that it does not involve any complicated calculation and insensitive to the sampling error. Experimental results show that the proposed method can effectively improve the displacement measurement accuracy of the LDSMI system to a few nanometers.

Paper Details

Date Published: 11 October 2010
PDF: 6 pages
Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76562Q (11 October 2010); doi: 10.1117/12.864103
Show Author Affiliations
Dongmei Guo, Nanjing Normal Univ. (China)
Hui Hao, Nanjing Normal Univ. (China)
Daofu Han, Nanchang Univ. (China)


Published in SPIE Proceedings Vol. 7656:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Jose M. Sasian; Libin Xiang; Sandy To, Editor(s)

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