Share Email Print
cover

Proceedings Paper

Novel metrological tuning fork atomic force microscope for optical surface characterization
Author(s): Jian Zhao; Tong Guo; Long Ma; Xing Fu; Xiaotang Hu
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A novel metrological tuning fork atomic force microscope (M-TFAFM) with an Abbe error free design is presented, which is aimed at traceable topographic and non-destructive characterization of the optical surfaces. Unlike the traditional AFM, the M-TFAFM does not need any optical detector to measure the bending of the cantilever, significantly saving the working space. A z-axis piezoelectric positioning stage (z-PPS), with high resonant frequency, is responsible for the rapid motion of the sample in z-direction. A high-end digital signal processing (DSP) servo control system further guarantees high measurement speed. A nano-measuring machine (NMM) is equipped as the lateral moving stage to realize three-dimensional measurement of the optical surfaces. Three interferometers in the NMM enable the measurement to be traced to the meter definition. In order to enhance the reliability of measurement, a convenient calibration method is designed. The results of the experiments show a good performance of the system.

Paper Details

Date Published: 11 October 2010
PDF: 6 pages
Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560G (11 October 2010); doi: 10.1117/12.864039
Show Author Affiliations
Jian Zhao, Tianjin Univ. (China)
Tong Guo, Tianjin Univ. (China)
Long Ma, Tianjin Univ. (China)
Xing Fu, Tianjin Univ. (China)
Xiaotang Hu, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 7656:
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Jose M. Sasian; Libin Xiang; Sandy To, Editor(s)

© SPIE. Terms of Use
Back to Top