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Proceedings Paper

Nano-patterning for LED light extraction and for nanorod LED array formation
Author(s): L. Y. Chen; Y. Y. Huang; C. S. Cheng; J. J. Huang
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Paper Abstract

Natural lithography is realized by spin-coating of nanoparticles. The surface textured LED s and nanorod structured LEDs have been made successfully. Concentrated radiation profiles of nanorod structured and surface textured LED are both observed. We fabricate these nano-structure by nature lithography method which use silica nanosphere as etching mask. The SiO2 grown by PECVD is used as a space layer to realize the nanorod LED. Furthermore, we suggest a light guided concept of the highly concentrated phenomena. The highest output power density of nanorod LEDs is achieved. The reversed current of nanorod LEDs is also reduced down to nA level.

Paper Details

Date Published: 23 August 2010
PDF: 6 pages
Proc. SPIE 7784, Tenth International Conference on Solid State Lighting, 77840B (23 August 2010); doi: 10.1117/12.863797
Show Author Affiliations
L. Y. Chen, National Taiwan Univ. (Taiwan)
Y. Y. Huang, National Taiwan Univ. (Taiwan)
C. S. Cheng, National Taiwan Univ. (Taiwan)
J. J. Huang, National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 7784:
Tenth International Conference on Solid State Lighting
Ian Ferguson; Matthew H. Kane; Nadarajah Narendran; Tsunemasa Taguchi, Editor(s)

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